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Application

16160683 · MEMS Devices and Methods of Forming Same

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Filed 2018-10-15 · Granted · Patent 10457550 (2019-10-29) The official file ↗The patent and its PDF ↗ · Art unit 2811 · Examiner Trang Q Tran Typical · CPC B81C 1/00301 · Taiwan Semiconductor Manufacturing Company, Ltd. · INTELLECTUAL PROPERTY DIVISION

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first was Notice of allowance
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to disposition 12.5 mo
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