Application

16164438 · PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY INCLUDING AN ACTUATOR SYSTEM

Filed 2018-10-18 · Abandoned The official file ↗ · Art unit 2882 · Examiner Hung Nguyen Easy · CPC G03F 7/7015 · Carl Zeiss SMT GmbH · FISH & RICHARDSON P.C. (BO)

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

4.9 mo

to disposition 11.3 mo

Statutes raised

103 112 DP

1 actions read

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