Application

16167429 · APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

Filed 2018-10-22 · Granted · Patent 10276347 (2019-04-30) The official file ↗The patent and its PDF ↗ · Art unit 2881 · Examiner Kiet Tuan Nguyen Easy · CPC H01J 37/28 · Hermes Microvision, Inc. · Finnegan/ASML

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

1.7 mo

to disposition 6.2 mo

Statutes raised

0 actions read

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