Application

16227399 · WAFER SOAK TEMPERATURE READBACK AND CONTROL VIA THERMOCOUPLE EMBEDDED END EFFECTOR FOR SEMICONDUCTOR PROCESSING EQUIPMENT

Filed 2018-12-20 · Granted · Patent 11011397 (2021-05-18) The official file ↗The patent and its PDF ↗ · Art unit 2895 · Examiner Md M Islam · CPC H10P 72/0602 · Axcelis Technologies, Inc. · Eschweiler & Potashnik, LLC (Axcelis)

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

25.0 mo

to disposition 28.9 mo

Statutes raised

0 actions read

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