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16228527 · METHODS AND APPARATUSES FOR ELECTROPLATING AND SEED LAYER DETECTION

Filed 2018-12-20 · Granted · Patent 10407794 (2019-09-10) The official file ↗The patent and its PDF ↗ · Art unit 2886 · Examiner Md M Rahman Easy · CPC H10P 14/47 · Lam Research Corporation · WEAVER AUSTIN VILLENEUVE & SAMPSON - LAMR/NOVL

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first was Notice of allowance
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4.2 mo
to disposition 8.7 mo
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