Application

16229102 · LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Filed 2018-12-21 · Granted · Patent 10788755 (2020-09-29) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Peter B Kim Typical · CPC G03F 7/20 · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman, LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

3.8 mo

to disposition 21.3 mo

Statutes raised

102 103 112

3 actions read

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