Application

16387502 · SUBSTRATE SUPPORT UNIT

Filed 2019-04-17 · Granted · Patent 10861735 (2020-12-08) The official file ↗The patent and its PDF ↗ · Art unit 3722 · Examiner Chwen-Wei Su Typical · CPC H10P 72/78 · SEMIgear, Inc. · Park, Kim & Suh, LLC

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

12.4 mo

to disposition 19.7 mo

Statutes raised

102 103

1 actions read

Unlock the prosecution timelineIncluded in Pro, from $29 a month. Cancel any time.