Application
16391990 · METHODS AND STRUCTURES FOR FORMING UNIFORM FINS WHEN USING HARDMASK PATTERNS
Filed 2019-04-23 · Granted · Patent 10535567 (2020-01-14) The official file ↗The patent and its PDF ↗ · Art unit 2819 · Examiner Ngan V Ngo Easy · CPC H10D 84/038 · International Business Machines Corporation · INTERNATIONAL BUSINESS MACHINES CORPORATION
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