Application

16396008 · SYSTEM AND METHOD FOR MONITORING TREATMENT OF MICROELECTRONIC SUBSTRATES WITH FLUID SPRAYS SUCH AS CRYOGENIC FLUID SPRAYS

Filed 2019-04-26 · Granted · Patent 11207715 (2021-12-28) The official file ↗The patent and its PDF ↗ · Art unit 1714 · Examiner Pradhuman Parihar Typical · CPC H10P 72/0406 · TEL FSI, INC. · Tokyo Electron U.S. Holdings, Inc.

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

13.4 mo

to disposition 32.1 mo

Statutes raised

103 112

2 actions read

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