PATLY.AIApplication
16402664 · METAL VIA PROCESSING SCHEMES WITH VIA CRITICAL DIMENSION (CD) CONTROL FOR BACK END OF LINE (BEOL) INTERCONNECTS AND THE RESULTING STRUCTURES
Filed 2019-05-03 · Granted · Patent 10636700 (2020-04-28) The official file ↗The patent and its PDF ↗ · Art unit 2898 · Examiner Chandra P Chaudhari Easy · CPC H10W 20/089 · Intel Corporation · SCHWABE, WILLIAMSON & WYATT, P.C.
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