Application

16509010 · Magnetic Integrated Lift Pin System for a Chemical Processing Chamber

Filed 2019-07-11 · Granted · Patent 11545387 (2023-01-03) The official file ↗The patent and its PDF ↗ · Art unit 3753 · Examiner Matthew William Jellett Typical · CPC H10P 72/7612 · TEL FSI, Inc. · Tokyo Electron U.S. Holdings, Inc.

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

33.8 mo

to disposition 41.8 mo

Statutes raised

112

1 actions read

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