Application

16665357 · Compensated Location Specific Processing Apparatus And Method

Filed 2019-10-28 · Granted · Patent 10861674 (2020-12-08) The official file ↗The patent and its PDF ↗ · Art unit 2881 · Examiner Jason L McCormack Typical · CPC H01J 37/304 · TEL Epion Inc. · Tokyo Electron U.S. Holdings, Inc.

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

3.3 mo

to disposition 13.4 mo

Statutes raised

102 103

2 actions read

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