Application

16677652 · METHODS AND SYSTEMS FOR INSPECTION OF WAFERS AND RETICLES USING DESIGNER INTENT DATA

Filed 2019-11-07 · Granted · Patent 11348222 (2022-05-31) The official file ↗The patent and its PDF ↗ · Art unit 2666 · Examiner Ruiping Li Typical · CPC G01N 21/9501 · KLA-Tencor Technologies Corporation · Entropy Matters LLC

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

19.4 mo

to disposition 30.8 mo

Statutes raised

102 103

2 actions read

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