PATLY.AIApplication
16678667 · METHOD FOR ACHIEVING STICTION-FREE HIGH-ASPECT-RATIO MICROSTRUCTURES AFTER WET CHEMICAL PROCESSING
Filed 2019-11-08 · Abandoned The official file ↗ · Art unit 1714 · Examiner Arlyn I Rivera-Cordero Typical · CPC B81C 1/00928 · TEL FSI, Inc. · Tokyo Electron U.S. Holdings, Inc.
Office actions
2
first was Non-final rejection
RCEs
0
no appeal
To first action
33.6 mo
to disposition 47.5 mo
Statutes raised
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2 actions read