Application

16682888 · APPARATUS AND TECHNIQUES FOR ANGLED ETCHING USING MULTIELECTRODE EXTRACTION SOURCE

Filed 2019-11-13 · Granted · Patent 11195703 (2021-12-07) The official file ↗The patent and its PDF ↗ · Art unit 1716 · Examiner Rakesh Kumar Dhingra Typical · CPC H01J 37/32568 · APPLIED Materials, Inc. · KDW Firm PLLC - Varian/Applied Materials (85525)

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

8.9 mo

to disposition 24.8 mo

Statutes raised

102

1 actions read

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