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16752157 · SELF-ALIGNED QUADRUPLE PATTERNING PROCESS FOR FIN PITCH BELOW 20nm

Filed 2020-01-24 · Abandoned The official file ↗ · Art unit 2815 · Examiner Long Huynh Le Typical · CPC H10D 30/024 · QUALCOMM Incorporated · QUALCOMM INCORPORATED

Office actions
1
first was Non-final rejection
RCEs
0
no appeal
To first action
18.2 mo
to disposition 26.5 mo
Statutes raised
103 112
1 actions read
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