Application

16780515 · SCATTERING LITHOGRAPHY

Filed 2020-02-03 · Granted · Patent 11067899 (2021-07-20) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Peter B Kim Typical · CPC G03F 7/70208 · Vathys, Inc. · Cognition IP, P.C.

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

9.6 mo

to disposition 17.5 mo

Statutes raised

103

1 actions read

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