Application

16825514 · TIN OXIDE THIN FILM SPACERS IN SEMICONDUCTOR DEVICE MANUFACTURING

Filed 2020-03-20 · Granted · Patent 11183383 (2021-11-23) The official file ↗The patent and its PDF ↗ · Art unit 1713 · Examiner Mahmoud Dahimene Typical · CPC H10P 76/405 · Lam Research Corporation · WEAVER AUSTIN VILLENEUVE & SAMPSON - LAMR/NOVL

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

12.5 mo

to disposition 20.1 mo

Statutes raised

0 actions read

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