Application

16854400 · HALFTONE PHASE SHIFT PHOTOMASK BLANK, MAKING METHOD, AND HALFTONE PHASE SHIFT PHOTOMASK

Filed 2020-04-21 · Granted · Patent 10859904 (2020-12-08) The official file ↗The patent and its PDF ↗ · Art unit 1737 · Examiner John A McPherson Easy · CPC C23C 14/042 · Shin-Etsu Chemical Co., Ltd. · BIRCH STEWART KOLASCH & BIRCH, LLP

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

4.4 mo

to disposition 7.6 mo

Statutes raised

0 actions read

Unlock the prosecution timelineIncluded in Pro, from $29 a month. Cancel any time.