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16870360 · Dual Metal Via for Contact Resistance Reduction

Filed 2020-05-08 · Granted · Patent 11349015 (2022-05-31) The official file ↗The patent and its PDF ↗ · Art unit 2829 · Examiner Scott C Stowe Typical · CPC H10D 62/021 · Taiwan Semiconductor Manufacturing Co., Ltd. · Haynes and Boone, LLP (24061)

Office actions
1
first was Non-final rejection
RCEs
0
no appeal
To first action
13.4 mo
to disposition 24.7 mo
Statutes raised
112 DP
1 actions read
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