Application

16904026 · Copper Contact Plugs with Barrier Layers

Filed 2020-06-17 · Granted · Patent 11251131 (2022-02-15) The official file ↗The patent and its PDF ↗ · Art unit 2892 · Examiner Robert Thomas Huber Hard · CPC H10W 20/20 · Taiwan Semiconductor Manufacturing Co., Ltd. · TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

5.7 mo

to disposition 20.0 mo

Statutes raised

102 103

2 actions read

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