Application

16905016 · METHOD FOR PERFORMING LITHOGRAPHY PROCESS WITH POST TREATMENT

Filed 2020-06-18 · Granted · Patent 11281107 (2022-03-22) The official file ↗The patent and its PDF ↗ · Art unit 1737 · Examiner Kathleen Duda Easy · CPC H10P 76/204 · Taiwan Semiconductor Manufacturing Co., Ltd. · BIRCH STEWART KOLASCH & BIRCH, LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

12.0 mo

to disposition 21.1 mo

Statutes raised

112 DP

2 actions read

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