Application

16953748 · PELLICLE SUPPORT FRAME, PELLICLE, METHOD FOR MANUFACTURING PELLICLE SUPPORT FRAME, AND EXPOSURE ORIGINAL PLATE AND EXPOSURE DEVICE EMPLOYING PELLICLE

Filed 2020-11-20 · Granted · Patent 11204547 (2021-12-21) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Colin Wright Kreutzer Typical · CPC G03F 1/64 · MITSUI CHEMICALS, INC. · BUCHANAN, INGERSOLL & ROONEY PC

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

10.8 mo

to disposition 13.0 mo

Statutes raised

0 actions read

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