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16983369 · METHOD FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE WITH METAL SILICIDE LAYER

Filed 2020-08-03 · Granted · Patent 11101354 (2021-08-24) The official file ↗The patent and its PDF ↗ · Art unit 2894 · Examiner David E Graybill Typical · CPC H10D 64/01 · Taiwan Semiconductor Manufacturing Co., Ltd. · BIRCH STEWART KOLASCH & BIRCH, LLP

Office actions
2
first was Non-final rejection
RCEs
0
no appeal
To first action
1.9 mo
to disposition 12.7 mo
Statutes raised
101 112 DP
2 actions read
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