Application

16994136 · MODULAR MICROWAVE PLASMA SOURCE

Filed 2020-08-14 · Granted · Patent 11404248 (2022-08-02) The official file ↗The patent and its PDF ↗ · Art unit 1716 · Examiner Stanislav Antolin Hard · CPC H01J 37/32192 · Applied Materials, Inc. · Schwabe, Williamson & Wyatt/AMAT

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

15.5 mo

to disposition 23.6 mo

Statutes raised

103 DP

1 actions read

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