Application

16998338 · METHODS FOR FORMING DOPED SILICON OXIDE THIN FILMS

Filed 2020-08-20 · Granted · Patent 11302527 (2022-04-12) The official file ↗The patent and its PDF ↗ · Art unit 2817 · Examiner Anthony Ho Easy · CPC H10P 14/6923 · ASM International N.V. · Knobbe, Martens, Olson & Bear, LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

11.7 mo

to disposition 19.7 mo

Statutes raised

1 actions read

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