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Application

17009961 · COMPOSITION AND METHOD FOR POLYSILICON CMP

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Filed 2020-09-02 · Granted · Patent 12157834 (2024-12-03) The official file ↗The patent and its PDF ↗ · Art unit 1713 · Examiner Jiong-Ping Lu Typical · CPC C09G 1/02 · Cabot Microelectronics Corporation · Thomas Omholt

Office actions
4
first was Non-final rejection
RCEs
1
appealed
To first action
10.2 mo
to disposition 51.0 mo
Statutes raised
102 103 112
4 actions read
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