Application

17023961 · PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY

Filed 2020-09-17 · Granted · Patent 11281114 (2022-03-22) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Christina A Riddle Typical · CPC G03F 7/70008 · Carl Zeiss SMT GmbH · FISH & RICHARDSON P.C. (BO)

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

11.3 mo

to disposition 18.1 mo

Statutes raised

102 112

1 actions read

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