Application

17048382 · METHODS AND SYSTEMS FOR PRINTING LARGE PERIODIC PATTERNS BY OVERLAPPING EXPOSURE FIELDS

Filed 2020-10-16 · Granted · Patent 11422471 (2022-08-23) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Peter B Kim Typical · CPC G03F 7/70408 · EULITHA A.G. · LERNER GREENBERG STEMER LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

13.8 mo

to disposition 22.2 mo

Statutes raised

103 112

2 actions read

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