Application

17088115 · MOVABLE BODY APPARATUS, MOVING METHOD, EXPOSURE APPARATUS, EXPOSURE METHOD, FLAT-PANEL DISPLAY MANUFACTURING METHOD, AND DEVICE MANUFACTURING METHOD

Filed 2020-11-03 · Granted · Patent 11402762 (2022-08-02) The official file ↗The patent and its PDF ↗ · Art unit 2877 · Examiner Michael A Lyons Easy · CPC G03F 7/70716 · NIKON CORPORATION · OLIFF PLC

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

7.4 mo

to disposition 20.9 mo

Statutes raised

101 DP

2 actions read

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