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17102444 · PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

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Filed 2020-11-24 · Granted · Patent 11387077 (2022-07-12) The official file ↗The patent and its PDF ↗ · Art unit 2844 · Examiner Jianzi Chen Typical · CPC H01J 37/32091 · Tokyo Electron Limited · Xsensus

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