Application

17108223 · ONIUM SALT COMPOUND, CHEMICALLY AMPLIFIED RESIST COMPOSITION AND PATTERNING PROCESS

Filed 2020-12-01 · Granted The official file ↗ · Art unit 1737 · Examiner Anna E Malloy Hard · CPC C07C 381/12 · Shin-Etsu Chemical Co., Ltd. · WHDA, LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

19.8 mo

to disposition 66.4 mo

Statutes raised

103 112 DP

7 actions read

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