Application

17109443 · EXPOSURE APPARATUS, MANUFACTURING METHOD OF FLAT-PANEL DISPLAY, DEVICE MANUFACTURING METHOD, AND EXPOSURE METHOD

Filed 2020-12-02 · Granted · Patent 11520242 (2022-12-06) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Hung Nguyen Easy · CPC G03F 7/70716 · NIKON CORPORATION · OLIFF PLC

Office actions

first was Final rejection

RCEs

no appeal

To first action

12.8 mo

to disposition 24.1 mo

Statutes raised

102 103 112

1 actions read

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