Application

17110194 · METHOD FOR REMOVING RE-SPUTTERED MATERIAL FROM PATTERNED SIDEWALLS

Filed 2020-12-02 · Granted · Patent 11615960 (2023-03-28) The official file ↗The patent and its PDF ↗ · Art unit 2812 · Examiner Reema Patel Typical · CPC H10P 50/20 · Cornell University · Russell Westerman

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

17.0 mo

to disposition 27.8 mo

Statutes raised

103 112

3 actions read

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