Application

17132608 · METHODS OF PROCESSING SUBSTRATE AND MANUFACTURING SEMICONDUCTOR DEVICE BY FORMING FILM, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM

Filed 2020-12-23 · Granted · Patent 11848203 (2023-12-19) The official file ↗The patent and its PDF ↗ · Art unit 1715 · Examiner Bret P Chen Easy · CPC H10P 90/12 · KOKUSAI ELECTRIC CORPORATION · VOLPE KOENIG

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

22.8 mo

to disposition 35.8 mo

Statutes raised

112 DP

1 actions read

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