Application

17135313 · VERTICAL FIELD-EFFECT TRANSISTOR LATE GATE RECESS PROCESS WITH IMPROVED INTER-LAYER DIELECTRIC PROTECTION

Filed 2020-12-28 · Granted · Patent 11575022 (2023-02-07) The official file ↗The patent and its PDF ↗ · Art unit 2826 · Examiner Benjamin P Sandvik Typical · CPC H10D 30/63 · International Business Machines Corporation · INTERNATIONAL BUSINESS MACHINES CORPORATION

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

18.1 mo

to disposition 25.3 mo

Statutes raised

102

1 actions read

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