Application

17137034 · METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM

Filed 2020-12-29 · Granted · Patent 11591694 (2023-02-28) The official file ↗The patent and its PDF ↗ · Art unit 2894 · Examiner Alexander Belousov Typical · CPC H10P 72/0604 · KOKUSAI ELECTRIC CORPORATION · VOLPE KOENIG

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

21.6 mo

to disposition 26.0 mo

Statutes raised

0 actions read

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