Application

17139262 · METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, RECORDING MEDIUM, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Filed 2020-12-31 · Granted · Patent 11753716 (2023-09-12) The official file ↗The patent and its PDF ↗ · Art unit 1718 · Examiner Christina D McClure Hard · CPC C23C 16/45527 · KOKUSAI ELECTRIC CORPORATION · VOLPE KOENIG

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

18.3 mo

to disposition 32.4 mo

Statutes raised

103

1 actions read

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