Application

17141097 · METHODS AND SYSTEM FOR CLEANING SEMICONDUCTOR WAFERS

Filed 2021-01-04 · Granted · Patent 11581205 (2023-02-14) The official file ↗The patent and its PDF ↗ · Art unit 1711 · Examiner Jason Y Ko Easy · CPC H10P 72/0604 · ACM Research (Shanghai) Inc. · K&L GATES LLP-Pittsburgh

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

22.5 mo

to disposition 25.3 mo

Statutes raised

0 actions read

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