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17143072 · AUTONOMOUS SUBSTRATE PROCESSING SYSTEM

Filed 2021-01-06 · Granted · Patent 11709477 (2023-07-25) The official file ↗The patent and its PDF ↗ · Art unit 2116 · Examiner Charles R Kasenge Typical · CPC G06N 20/00 · Applied Materials, Inc. · LOWENSTEIN SANDLER LLP / AMAT

Office actions
2
first was Non-final rejection
RCEs
0
no appeal
To first action
19.6 mo
to disposition 30.6 mo
Statutes raised
102 103
2 actions read
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