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Application

17145039 · SUBSTRATE TREATING APPARATUS WITH PARALLEL FIRST AND SECOND PARTS OF SUBSTRATE TREATMENT LINES ON MULTIPLE STORIES FOR SIMULTANEOUSLY TREATING A PLURALITY OF SUBSTRATES

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Filed 2021-01-08 · Granted · Patent 12217986 (2025-02-04) The official file ↗The patent and its PDF ↗ · Art unit 1717 · Examiner Karl Kurple Hard · CPC H10P 72/0448 · SCREEN Semiconductor Solutions Co., Ltd. · Kilpatrick Townsend & Stockton LLP - West Coast

Office actions
3
first was Restriction requirement
RCEs
1
no appeal
To first action
25.1 mo
to disposition 48.9 mo
Statutes raised
103 DP
3 actions read
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