Application

17150942 · METHOD FOR ETCHING OR DEPOSITION

Filed 2021-01-15 · Granted · Patent 11624111 (2023-04-11) The official file ↗The patent and its PDF ↗ · Art unit 1715 · Examiner Bret P Chen Easy · CPC H10P 14/43 · ENTEGRIS, INC. · ENTEGRIS, INC./OC

Office actions

first was Restriction requirement

RCEs

no appeal

To first action

7.7 mo

to disposition 26.8 mo

Statutes raised

103 112

2 actions read

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