Application

17151291 · SUBSTRATE HOLDER, A LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTURING DEVICES

Filed 2021-01-18 · Granted · Patent 11579533 (2023-02-14) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Hung Nguyen Easy · CPC G03F 7/70341 · ASML NETHERLANDS B.V. · Pillsbury Winthrop Shaw Pittman, LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

13.7 mo

to disposition 24.9 mo

Statutes raised

103 112 DP

1 actions read

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