Application

17161035 · METHOD OF MEASURING MISREGISTRATION OF SEMICONDUCTOR DEVICES

Filed 2021-01-28 · Granted · Patent 11226566 (2022-01-18) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Colin Wright Kreutzer Typical · CPC H10P 74/203 · KLA-TENCOR CORPORATION · KLA Corporation / Hodgson Russ LLP

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

7.2 mo

to disposition 11.7 mo

Statutes raised

0 actions read

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