Application

17178089 · GREY-MODE SCANNING SCATTEROMETRY OVERLAY METROLOGY

Filed 2021-02-17 · Granted · Patent 11300405 (2022-04-12) The official file ↗The patent and its PDF ↗ · Art unit 2877 · Examiner Michael A Lyons Easy · CPC G01B 11/272 · KLA Corporation · KEVIN MCANDREWS

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

9.2 mo

to disposition 13.8 mo

Statutes raised

0 actions read

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