Application

17187272 · DROPLET GENERATOR AND METHOD OF SERVICING A PHOTOLITHOGRAPHIC TOOL

Filed 2021-02-26 · Granted · Patent 11275317 (2022-03-15) The official file ↗The patent and its PDF ↗ · Art unit 2882 · Examiner Colin Wright Kreutzer Typical · CPC H05G 2/002 · TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. · McDermott Will & Schulte LLP

Office actions

first was Non-final rejection

RCEs

no appeal

To first action

5.0 mo

to disposition 12.6 mo

Statutes raised

102

1 actions read

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