PATLY.AIApplication
17200526 · INTEGRATED ATOMIC LAYER PASSIVATION IN TCP ETCH CHAMBER AND IN-SITU ETCH-ALP METHOD
Filed 2021-03-12 · Abandoned The official file ↗ · Art unit 1716 · Examiner Keath T Chen Typical · CPC H10P 50/244 · Lam Research Corporation · PENILLA IP, APC and Lam Research Corp.
Office actions
3
first was Non-final rejection
RCEs
1
no appeal
To first action
29.0 mo
to disposition 44.8 mo
Statutes raised
103 112
3 actions read