Application
17200954 · MEMS DUAL SUBSTRATE SWITCH WITH MAGNETIC ACTUATION
Filed 2021-03-15 · Granted · Patent 11594389 (2023-02-28) The official file ↗The patent and its PDF ↗ · Art unit 2837 · Examiner Mohamad A Musleh Typical · CPC H01H 50/005 · Innovative Micro Technology · Jaquelin K. Spong
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