PATLY.AIApplication
17210652 · N-ALKYL SUBSTITUTED CYCLIC AND OLIGOMERIC PERHYDRIDOSILAZANES, METHODS OF PREPARATION THEREOF, AND SILICON NITRIDE FILMS FORMED THEREFROM
Filed 2021-03-24 · Granted · Patent 11702434 (2023-07-18) The official file ↗The patent and its PDF ↗ · Art unit 1623 · Examiner Pancham Bakshi Easy · CPC C07F 7/21 · Gelest Technologies, Inc. · PANITCH SCHWARZE BELISARIO & NADEL LLP
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first was Restriction requirement
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12.1 mo
to disposition 27.8 mo
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