Application

17224407 · ELECTRON BEAM SYSTEM FOR INSPECTION AND REVIEW OF 3D DEVICES

Filed 2021-04-07 · Granted · Patent 11335608 (2022-05-17) The official file ↗The patent and its PDF ↗ · Art unit 2881 · Examiner Phillip A Johnston Typical · CPC H10P 74/203 · KLA Corporation · KLA Corporation / Hodgson Russ LLP

Office actions

first was Notice of allowance

RCEs

no appeal

To first action

9.3 mo

to disposition 13.3 mo

Statutes raised

0 actions read

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